Control of MEMS on the edge of instability

ICB Affiliated Authors

Kimberly Turner

Authors

C. Burgner, W. Snyders, and K. Turner

Date

June 1, 2011

Type

Peer-Reviewed Conference Presentation

Journal

Proceedings of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS)

Pages

1990–1993

DOI

10.1109/TRANSDUCERS.2011.5969197

City

Beijing

Country

China